The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2026
Filed:
Jun. 24, 2022
Screen Holdings Co., Ltd., Kyoto, JP;
Takuma Takahashi, Kyoto, JP;
Tomoyuki Shinohara, Kyoto, JP;
Junichi Ishii, Kyoto, JP;
Kazuki Nakamura, Kyoto, JP;
Takashi Shinohara, Kyoto, JP;
Nobuaki Okita, Kyoto, JP;
Yoshifumi Okada, Kyoto, JP;
SCREEN HOLDINGS CO., LTD., , JP;
Abstract
A substrate cleaning device includes an upper holding device. The upper holding device holds a substrate in a horizontal attitude without rotating the substrate, while being in contact with an outer peripheral end of the substrate. A lower-surface brush wetted with a cleaning liquid is pressed against a lower-surface center region of the substrate held by the upper holding device. In this state, the lower-surface brush is rotated or moved with respect to the lower-surface center region of the substrate. Thus, the lower-surface center region of the substrate is cleaned.