The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2026
Filed:
Apr. 04, 2024
Applied Materials, Inc., Santa Clara, CA (US);
Arvinder Manmohansingh Chadha, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An electrostatic chuck includes a ceramic puck including a plurality of mesas configured to support a substrate. The electrostatic chuck further includes an electrode disposed within the ceramic puck. The electrode is configured to electrostatically clamp the substrate to the ceramic puck responsive to being energized with a clamping voltage. The electrode includes a plurality of perforations. At least one perforation of the plurality of perforations is disposed beneath at least one mesas of the plurality of mesas.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile