The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2026
Filed:
Aug. 24, 2020
Shenzhen Hypernano Optics Technology Co., Ltd, Shenzhen, CN;
Bin Guo, Shenzhen, CN;
Jinbiao Huang, Shenzhen, CN;
SHENZHEN HYPERNANO OPTICS TECHNOLOGY CO., LTD., Shenzhen, CN;
Abstract
A tunable Fabry-Perot cavity device having movable mirror is disclosed, said movable mirror being provided opposite another mirror, said movable mirror and said another mirror being bonded to each other at the periphery to form a Fabry-Perot cavity between said mirror, said movable mirror comprising a silicon film inlaid with glass, a central region of said silicon film being inlaid with glass to form a light transmitting region, surface of the light-transmitting region facing the Fabry-Perot cavity is provided with mirror material, transition region of the silicon film between bonded periphery region and the central region is inlaid with glass to form an elastic structure. Since the Young's modulus of silicon is much higher than that of glass, the silicon film inlaid with glass can have good mechanical strength and stable elastic coefficient and free from being affected by stress.