The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 14, 2026

Filed:

Jul. 06, 2022
Applicants:

Nuctech Company Limited, Beijing, CN;

Tsinghua University, Beijing, CN;

Inventors:

Li Zhang, Beijing, CN;

Zhiqiang Chen, Beijing, CN;

Qingping Huang, Beijing, CN;

Hui Ding, Beijing, CN;

Yong Zhou, Beijing, CN;

Xin Jin, Beijing, CN;

Liming Yao, Beijing, CN;

Assignees:

NUCTECH COMPANY LIMITED, Beijing, CN;

Tsinghua University, Beijing, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01V 5/226 (2024.01); G01N 23/046 (2018.01); G01N 23/083 (2018.01); G01N 23/10 (2018.01);
U.S. Cl.
CPC ...
G01V 5/226 (2024.01); G01N 23/046 (2013.01); G01N 23/083 (2013.01); G01N 23/10 (2013.01); G01N 2223/1016 (2013.01); G01N 2223/204 (2013.01); G01N 2223/3303 (2013.01); G01N 2223/401 (2013.01); G01N 2223/639 (2013.01); G01N 2223/643 (2013.01);
Abstract

An inspection system and method, the inspection system includes: a carrying device, at least one ray source, where each ray source includes a separate housing to define a vacuum space and a plurality of target spots enclosed within the housing; and a detector assembly. The at least one ray source and the detector assembly are lifted or lowered along a central axis of the carrying device relative to the carrying device. When viewed along the central axis, the ray source is translatable between scanning positions relative to the carrying device. When the ray source is at one of the scanning positions, the ray source and the detector assembly are lifted or lowered along the central axis, and the ray source emits X-rays; and when the ray source and the detector assembly are lifted or lowered a predetermined distance, the ray source translates to another one of the scanning positions.


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