The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2026
Filed:
Oct. 16, 2024
Applicant:
Panasonic Intellectual Property Management Co., Ltd., Osaka, JP;
Inventors:
Yasuhiro Kabetani, Osaka, JP;
Takashi Urashima, Osaka, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02091 (2022.01);
U.S. Cl.
CPC ...
G01B 9/02091 (2013.01); G01B 2290/25 (2013.01);
Abstract
When light adjusted at equal frequency intervals by optical comb generation filteris incident and emitted from measurement headto measurement target W, the light adjusted at equal frequency intervals by optical comb generation filteris divided into measurement light and reference light by light division unit, and interference light in which reflected light of the measurement light from measurement target W and the reference light are multiplexed is detected by interference light detection unit