The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2026
Filed:
Jul. 17, 2024
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Kenji Mochidzuki, Nishitokyo, JP;
SUMITOMO HEAVY INDUSTRIES, LTD., Tokyo, JP;
Abstract
A cryopump includes: a cryopump container including a cryopump intake port; a radiation shield that is cooled to a first cooling temperature and extends from the cryopump intake port into the cryopump container; a cryopanel unit that is cooled to a second cooling temperature lower than the first cooling temperature and is disposed to be surrounded by the radiation shield in the cryopump container; and an intake port shield that is cooled to the first cooling temperature and is disposed at the cryopump intake port such that the cryopanel unit is not visible from an outside of the cryopump, in which the radiation shield includes a first gas inlet formed at a height between the intake port shield and the cryopanel unit.