The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2026
Filed:
Apr. 01, 2021
Applicant:
Merck Patent Gmbh, Darmstadt, DE;
Inventors:
Assignee:
Merck Patent GmbH, Darmstadt, DE;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C11D 7/50 (2006.01); C11D 3/04 (2006.01); C11D 3/20 (2006.01); C11D 17/00 (2006.01); G03F 7/039 (2006.01); G03F 7/20 (2006.01); G03F 7/40 (2006.01);
U.S. Cl.
CPC ...
C11D 3/2079 (2013.01); C11D 3/044 (2013.01); C11D 17/0008 (2013.01); G03F 7/0392 (2013.01); G03F 7/2004 (2013.01); G03F 7/40 (2013.01); C11D 2111/22 (2024.01);
Abstract
[Problem] To provide an electronic device manufacturing aqueous solution, which makes it possible to prevent pattern collapse or suppress non-uniformity of resist pattern width. [Means for Solution] An electronic device manufacturing aqueous solution comprising an alkylcarboxylic acid compound (A) and a solvent (B), wherein the alkylcarboxylic acid compound (A) is represented by the formula (a): A-COOH (a), wherein Ais Calkyl, and the solvent (B) comprises water.