Acoustic element integrated circuit, probe, and diagnosis device

Abstract

An acoustic element integrated circuit includes cells, being arrayed two-dimensionally on a same curved surface, wherein capacitive acoustic-elements having vibration membranes are allocated by unit number in each of the cells. Each of the cells encompasses an intra-cell circuit, which includes an exciting circuit for driving collectively portions by the unit number, the portions having transmitting functions of the acoustic-elements, and a reception circuit for processing collectively received signals transferred from portions by the unit number, the portions having reception functions in the acoustic-elements. Here, the exciting circuits are sorted into a chip in which high-voltage drivers for exciting the vibration membranes are merged and a chip in which circuits operated at voltages lower than the high-voltage drivers are merged, and the cells are operated two-dimensionally, by individually controlling the intra-cell circuits so that cells can be driven independently.