The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2026
Filed:
Mar. 11, 2022
Kioxia Corporation, Tokyo, JP;
Kioxia Corporation, Tokyo, JP;
Abstract
According to one embodiment, a semiconductor memory device incudes: a stacked body in which a plurality of first conductive layers and a plurality of first insulating layers are alternately stacked one by one; and a contact that extends in the stacked body in the stacking direction, and is connected to a structure arranged on in the stacked body or below the stacked body. The contact includes: a second conductive layer that extends in the stacked body LM in the stacking direction, and serves as a core of the contact; and a second insulating layer that covers a sidewall of the second conductive layer, and serves as a liner of the contact. At least at a point close to the structure, when viewed in a cross section taken in a direction intersecting the stacking direction, a variation, in a circumferential direction of the contact, of a first distance from a center point of the second conductive layer to an outer edge of the second insulating layer is larger than a variation, in the circumferential direction of the contact, of a second distance from the center point to an outer edge of the second conductive layer.