The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2026
Filed:
Sep. 28, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventor:
Vijay D. Parkhe, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10P 72/76 (2026.01); H10P 72/00 (2026.01); H10P 72/72 (2026.01);
U.S. Cl.
CPC ...
H10P 72/7626 (2026.01); H10P 72/0432 (2026.01); H10P 72/0604 (2026.01); H10P 72/72 (2026.01);
Abstract
A substrate support assembly includes a shaft body, a plate attached to an upper portion of the shaft body, and a plug or cap attached to a lower portion of the shaft body. The shaft body, the plate and the plug or cap define an internal shaft area having an isolated environment. The internal shaft area is a vacuum environment or comprises an inert gas.