The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2026
Filed:
Jan. 26, 2024
Device Co., Ltd., Chungcheongnam-do, KR;
Taek Youb Lee, Cheonan-si, KR;
DEVICE CO., LTD., Chungcheongnam-do, KR;
Abstract
The present disclosure relates to a substrate support assembly for a substrate treatment apparatus, including: a chuck base disposed to face a substrate, when the substrate is installed, and rotatable around a rotational axis; chuck pins protruding from top of the chuck base to hold or separate the substrate thereonto or therefrom; a mechanism being connected to the chuck pins; and driving parts for driving the mechanism, wherein the mechanism may include: first operating parts each having a pusher cam movable ascendably/descendably and restorably in a direction of the rotational axis; a second operating part interlocking with the pusher cams in such a way as to reciprocatingly rotate around the rotational axis; and first restoring members each connecting the chuck base and the second operating part to each other.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile