The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 07, 2026

Filed:

Jul. 05, 2022
Applicant:

Screen Holdings Co., Ltd., Kyoto, JP;

Inventors:

Tatsuhiro Suzuki, Kyoto, JP;

Akihiko Taki, Kyoto, JP;

Yuta Nishimura, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10P 72/00 (2026.01); B05D 3/04 (2006.01);
U.S. Cl.
CPC ...
H10P 72/0402 (2026.01); B05D 3/0486 (2013.01); H10P 72/0414 (2026.01); H10P 72/0462 (2026.01);
Abstract

Each of branch pipes has an internal space into which an atmosphere flows from a main pipe. A downstream damper is provided on the downstream side of an upstream damper in each of the branch pipes, and opens/closes the branch pipe. An upstream switching member switches a state of an upstream space between a state where the upstream space permits an inflow of an external atmosphere and a state where the upstream space prohibits the inflow of the external atmosphere. A downstream switching member switches a state of a downstream space between a state where the downstream space permits an inflow of the external atmosphere and a state where the downstream space prohibits the inflow of the external atmosphere.


Find Patent Forward Citations

Suzuki, Tatsuhiro. (2026). Substrate processing apparatus (U.S. Patent No. 12677622). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12677622

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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