The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 07, 2026

Filed:

Dec. 30, 2024
Applicant:

Waviks, Inc., Dallas, TX (US);

Inventors:

Thomas M. Moore, Dallas, TX (US);

Benjamin Wolf, Dallas, TX (US);

Gonzalo Amador, Dallas, TX (US);

Assignee:

Waviks, Inc., Dallas, TX (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
H01J 37/22 (2013.01); H01J 37/226 (2013.01); H01J 37/261 (2013.01); H01J 2237/2602 (2013.01);
Abstract

An optical probe system and a microscope system. The optical probe system includes an optical probe with an optical probe shaft configured to extend at least partially into a vacuum chamber of a charged particle beam microscope. A first and second optical channel can extend through the optical probe shaft. The first optical channel accommodates a portion of a segmented optical axis, and the second optical channel accommodates an unsegmented optical axis. The segmented optical axis includes at least a first segment that substantially parallel to the unsegmented optical axis and at least a second segment that is not substantially parallel to the unsegmented optical axis, and the first segment of the segmented optical axis and the unsegmented optical axis are positioned within the optical probe shaft to permit the first optical channel and the second optical channel to simultaneously address a sample within the vacuum chamber.


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