Schedule creation method, schedule creating device, substrate processing apparatus, substrate processing system, and storage medium

Abstract

A schedule creation method is a method for creating a time schedule by executing a learning step multiple times. The learning step includes sequentially placing patterns each indicating a procedure in a processing sequence in a timetable for defining a time schedule for respective elements of a substrate processing apparatus. The sequentially placing patterns in a timetable includes: acquiring one or more placeable patterns that are allowed to be placed in the timetable from among the patterns based on a prescribed constraint condition; predicting and selecting through machine learning a pattern that makes an evaluation value maximum from among the one or more placeable patterns; and updating the timetable by placing the selected pattern in the timetable.