The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2026
Filed:
Sep. 01, 2021
Iucf-hyu (Industry-university Cooperation Foundation Hanyang University), Seoul, KR;
Abstract
A mask for extreme ultraviolet lithography is provided. The mask for extreme ultraviolet lithography comprises: a reflective structure comprising a plurality of unit layers laminated on a substrate and an etch stop layer placed between one pair of adjoining unit layers among the plurality of unit layers and having a trench through which the etch stop layer is exposed; and an absorption pattern placed on the bottom surface of the trench, wherein each of the unit layers comprises a first material layer and a second material layer on the first material layer.
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