Measuring device for capacitance of semiconductor device and measurement jig

Abstract

To improve the measurement accuracy of feedback capacitance of a semiconductor device. Between a gate terminal of a semiconductor device subject to measurement and an Lc terminal of an LCR meter, a first wiring that is passed through a core of a transformer once and connected between a gate terminal and a source terminal and a second wiring wound N times around a core of the transformer, and one end is connected to the Lc terminal and the other end is grounded are provided. when ω represents an angular frequency of the AC signal applied to the drain terminal of the semiconductor device, Lrepresents inductance of the first wiring, Lrepresents inductance of the second wiring, and Crepresents gate-source parasitic capacitance of the semiconductor device, a relationship of ωL<1/(ωC), and ωL/N<1/(ωC) are satisfied.