The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2026
Filed:
Jan. 25, 2024
Applied Materials, Inc., Santa Clara, CA (US);
Chien-Min Liao, Santa Clara, CA (US);
Chao C. Liu, San Jose, CA (US);
Tom Cho, Los Altos, CA (US);
Hyeon Geu Kim, Santa Clara, CA (US);
Hari Ponnekanti, San Jose, CA (US);
Jay Merkel, Los Gatos, CA (US);
Bruce Alger, San Jose, CA (US);
Sathish Babu Janjam, Santa Clara, CA (US);
Cheng-Hsuan Chou, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Described herein is a chamber component having a body comprising a plurality of aluminum alloy compositions. A first portion of the body includes a first aluminum alloy composition having a first grain size, and a second portion of the body includes a second aluminum alloy composition having a second grain size, wherein the first grain size of the first aluminum alloy composition is greater than the second grain size of the second aluminum alloy composition. A method for preparing the chamber component is also provided.