The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2026
Filed:
Mar. 21, 2023
Applicant:
Semes Co., Ltd., Chungcheongnam-do, KR;
Inventors:
Bu Young Jung, Chungcheongnam-do, KR;
Ju Hwan Lee, Chungcheongnam-do, KR;
Hyun Woo Bae, Chungcheongnam-do, KR;
Assignee:
SEMES CO., LTD., Chungcheongnam-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05B 13/02 (2006.01); B05B 14/10 (2018.01); B05B 14/30 (2018.01); B05C 9/06 (2006.01); B05B 7/16 (2006.01); B05B 14/40 (2018.01); B05B 15/58 (2018.01); B05B 15/658 (2018.01); B05B 16/60 (2018.01); B05D 1/34 (2006.01); H10P 72/00 (2026.01);
U.S. Cl.
CPC ...
B05B 13/0278 (2013.01); B05B 14/10 (2018.02); B05B 14/30 (2018.02); B05C 9/06 (2013.01); B05B 7/16 (2013.01); B05B 7/1693 (2013.01); B05B 14/40 (2018.02); B05B 15/58 (2018.02); B05B 15/658 (2018.02); B05B 16/60 (2018.02); B05D 1/34 (2013.01); H10P 72/0414 (2026.01);
Abstract
A substrate processing apparatus includes a first supply pipe supplying a first chemical liquid to a substrate, a second supply pipe, spaced apart from the first supply pipe, and supplying a second chemical liquid to the substrate, and a recovery pipe connected to the first supply pipe to collect the first chemical liquid, and disposed between the first supply pipe and the second supply pipe.
Jung, Bu. (2026). Substrate processing apparatus (U.S. Patent No. 12673339). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12673339
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile