The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2026
Filed:
Jun. 18, 2024
Applied Materials, Inc., Santa Clara, CA (US);
Patricia Schulze, Giddings, TX (US);
Gregory John Freeman, Austin, TX (US);
Michael Kutney, Santa Clara, CA (US);
Arunkumar Ramachandraiah, Bengaluru, IN;
Chih Chung Chou, San Jose, CA (US);
Zhaozhao Zhu, Milpitas, CA (US);
Ozkan Celik, Cedar Park, TX (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An optical measurement device comprises a substrate holder to secure a substrate, a plurality of actuators to move the substrate holder relative to a plurality of axes, a first sensor to generate one or more first measurements or images of a first plurality of target positions on the substrate, and a second sensor to generate one or more second measurements of a second plurality of target positions on the substrate. The optical measurement device further comprises a plate, wherein the substrate holder, the plurality of actuators, the first sensor and the second sensor are each mounted to the plate, and wherein the plate provides vibration isolation from a factory interface to which the optical measurement device mounts. The optical measurement device further comprises a processing device that executes instructions to control the plurality of actuators and process the first measurements or images and the second measurements.