Supporting structure and inspection equipment therefof and calibrating tool for inspection equipment

Abstract

A supporting structure and an inspection equipment thereof and a calibrating tool for the inspection equipment include backbone and parallel blocks in the supporting structure. The receiving trench is defined between two adjacent supporting portions on the backbone for receiving supporter. Each supporting portion has a first limiting portion and the supporter has a second limiting portion. The parallel block is disposed between the first and the second limiting portion to restrain relative movement of the supporter. The inspection equipment is used for inspecting the supporting structure and includes plural inspection regions for inspecting the deviation amount of the supporter based on how much the moving door travels towards the substrate carrier. The calibrating tool is used for calibrating the inspection equipment. Whether the inspection surface conforms with a calibration condition is inspected through the inspection regions based on how much the moving door travels toward the calibrating tool.