The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 30, 2026

Filed:

Nov. 27, 2023
Applicant:

Korea Research Institute of Standards and Science, Daejeon, KR;

Inventors:

Takashi Ogawa, Daejeon, KR;

In Yong Park, Daejeon, KR;

Jeong Woong Lee, Daejeon, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/12 (2006.01); H01J 37/244 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/12 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); H01J 2237/24475 (2013.01); H01J 2237/2448 (2013.01);
Abstract

An objective lens for a charged particle beam apparatus that provides a charged particle beam to a sample, includes: a first electrode exposed to face a sample; a second electrode configured to focus a charged particle beam to the sample; a third electrode comprising a conical tip and a body extending from the tip; and a fourth electrode located in the body of the third electrode. Each of the first electrode, the second electrode, the third electrode, and the fourth electrode has a through-hole, and the charged particle beam is provided to the sample through the through-hole in response to a voltage applied.


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Ogawa, Takashi. (2026). Objective lens and charged particle beam apparatus including same (U.S. Patent No. 12671052). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12671052

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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