High-speed automatic film-foreign substance detection apparatus

Abstract

The present invention provides a high-speed automatic film-foreign substance detection apparatus, including: a stage on which a sample is mounted; a plurality of side light units arranged on an upper side surface of the stage to irradiate side light toward a sample during an operation of a low-magnification optical module; a low-magnification optical module installed at an upper side of the stage and generating a low-magnification image by capturing the sample so that the foreign substance can be detected from the sample using the light scattering of the foreign substance by the side light irradiated from the side light unit; a high-magnification optical module installed at one side of the stage, having a high-magnification driving unit installed and connected thereto to drive in directions of an x-axis, a y-axis and a z-axis, and generating a high-magnification image by capturing the sample; and a user device for controlling the operation of the low-magnification optical module and the high-magnification optical module, and receiving, storing, playing and analyzing the low-magnification image and the high-magnification image.