The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 30, 2026

Filed:

Oct. 27, 2023
Applicant:

Unm Rainforest Innovations, Albuquerque, NM (US);

Inventors:

Tito Busani, Albuquerque, NM (US);

Ravi Kiran Chityala, Albuquerque, NM (US);

Arjun Aryal, Albuquerque, NM (US);

Assignee:

UNM Rainforest Innovations, Albuquerque, NM (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B81C 99/00 (2010.01);
U.S. Cl.
CPC ...
B81C 99/008 (2013.01); B81C 2201/038 (2013.01);
Abstract

A low-cost, conventional release using low concentrations of HF to overcome the stiction of MEMS structure.


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