The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2026
Filed:
Nov. 16, 2023
Korea Institute of Science and Technology, Seoul, KR;
Seung Hyub Baek, Seoul, KR;
Min Seok Kim, Seoul, KR;
Ji-Soo Jang, Seoul, KR;
Sunghoon Hur, Seoul, KR;
Jungho Yoon, Seoul, KR;
Hyun-Cheol Song, Seoul, KR;
Seong Keun Kim, Seoul, KR;
Ji-Won Choi, Seoul, KR;
Jin Sang Kim, Seoul, KR;
Chong Yun Kang, Seoul, KR;
Korea Institute of Science and Technology, Seoul, KR;
Abstract
Disclosed is a heterojunction semiconductor flexible substrate in which an epitaxial oxide thin film layer is hetero-bonded to a thinned silicon substrate using a metal layer, a manufacturing method thereof, and the heterojunction semiconductor flexible substrate can be applied to sensor, actuator, transducer, or micro electro mechanical systems (MEMS) device using high functionality of the epitaxial oxide thin film layer of high quality as well as an electronic and/or optical device.