The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 23, 2026

Filed:

Mar. 24, 2023
Applicant:

Qualcomm Incorporated, San Diego, CA (US);

Inventors:

Abhijeet Paul, Escondido, CA (US);

Jonghae Kim, San Diego, CA (US);

Mishel Matloubian, San Diego, CA (US);

Assignee:

QUALCOMM Incorporated, San Diego, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/17 (2006.01); H03H 3/02 (2006.01);
U.S. Cl.
CPC ...
H03H 9/173 (2013.01); H03H 3/02 (2013.01); H03H 2003/021 (2013.01);
Abstract

Disclosed are techniques for an integrated circuit (IC) that includes one or more transistors on a substrate and an interconnection structure on the one or more transistors. The interconnection structure includes a semiconductor structure embedded in the interconnection structure. In an aspect, the semiconductor structure includes a cavity structure, a piezoelectric layer over the cavity structure, an upper conductive structure on the piezoelectric layer, and a first contact structure on the upper conductive structure. In an aspect, the cavity structure includes a bottom that is a part of a first etch stop layer over a substrate, a top that is a part of a second etch stop layer over the first etch stop layer, one or more sidewalls connecting the bottom and the top of the cavity structure, and a cavity between the top and the bottom of the cavity structure and surrounded by the one or more sidewalls.


Find Patent Forward Citations

Paul, Abhijeet. (2026). Monolithic-integrated bulk acoustic wave (baw) resonator (U.S. Patent No. 12665568). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12665568

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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