The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2026
Filed:
Jul. 19, 2022
Koninklijke Philips N.v., Eindhoven, NL;
Didier Mathijs Maria Justina Petit, Aachen, DE;
Marcus Antonius Verschuuren, Eindhoven, NL;
Johannes Balthasar Maria Soetens, Eindhoven, NL;
Maurice Leonardus Johannes Janssen, Aachen, DE;
Koninklijke Philips N.V., Eindhoven, NL;
Abstract
An imprinting apparatus comprises a first carrier for carrying a flexible stamp, a set of carrier actuators for translating the first carrier in a direction parallel to a plane of the first carrier, and a second carrier movable relative to the first carrier and configured to carry a substrate having a resist layer. The second carrier comprises a chuck and a set of chuck actuators for translating a portion of the chuck in a direction perpendicular to a plane of the second carrier. This imprinting apparatus provides alignment between the flexible stamp and the substrate by controlling an in-plane position of the first carrier (so enabling X, Y and Rz position control) and controlling Z axis positions of the second carrier (so enabling Rx, Ry and Z position control). Thus, 6DOF position adjustment is enabled with a simple structure. Thus precise control of X, Y and Z translations and rotations is enabled while also enabling loading of substrates and/or stamps.