The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 23, 2026

Filed:

Dec. 20, 2023
Applicant:

Mitsubishi Electric Research Laboratories, Inc., Cambridge, MA (US);

Inventors:

Joshua Rapp, Somerville, MA (US);

Hassan Mansour, Cambridge, MA (US);

Petros Boufounos, Winchester, MA (US);

Toshiaki Koike Akino, Cambridge, MA (US);

Kieran Parsons, Cambridge, MA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/02091 (2022.01); G01B 9/02 (2022.01); G01B 9/02055 (2022.01); G01B 11/30 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02091 (2013.01); G01B 9/02044 (2013.01); G01B 9/0207 (2013.01); G01B 11/30 (2013.01);
Abstract

An optical coherence tomography (OCT) system comprises an interferometer configured to interfere a test beam reflected from a specimen with a reference beam to produce an interference pattern. The OCT system also comprises a spectrometer configured to measure a spectrum of the interference pattern to produce measurements of intensities of the interference pattern corresponding to different wavelengths. The OCT system further comprises a processor configured to determine noise statistics of the intensities of the interference pattern and use the noise statistics to set a threshold for detecting a number of layers of the specimen penetrated by the test beam at the location based on a pre-specified probability of false acceptance of noise as a signal. The processor is further configured to determine the profilometry measurements as an estimate of depths of the layers of the specimen causing the intensities of the interference pattern above the threshold.


Find Patent Forward Citations

Loading…