The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2026
Filed:
Mar. 14, 2023
Applicant:
Korea Institute of Science and Technology, Seoul, KR;
Inventors:
Seung Hee Han, Seoul, KR;
Unhyeon Kang, Seoul, KR;
Eunbi Jeong, Seoul, KR;
Soeun Ahn, Seoul, KR;
Kyoung Ho Jeon, Seoul, KR;
Assignee:
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY, Seoul, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/505 (2006.01); C23C 16/26 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 16/505 (2013.01); C23C 16/26 (2013.01); H01J 37/32082 (2013.01); H01J 37/32816 (2013.01); H01J 2237/332 (2013.01);
Abstract
An exemplary embodiment of the present invention can provide a method of manufacturing a graphene film, including preparing a substrate including a carbon layer in a chamber, and forming a graphene layer by forming plasma in the chamber and applying a positive voltage pulse to the substrate.