The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2026
Filed:
Jan. 25, 2024
Applicant:
Screen Holdings Co., Ltd., Kyoto, JP;
Inventor:
Yuta Sasaki, Kyoto, JP;
Assignee:
SCREEN Holdings Co., Ltd., , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10P 72/00 (2026.01); C07C 251/32 (2006.01); C07C 251/44 (2006.01); C11D 3/43 (2006.01); C11D 7/32 (2006.01); H10P 70/00 (2026.01);
U.S. Cl.
CPC ...
H10P 72/0408 (2026.01); C07C 251/32 (2013.01); C11D 7/3209 (2013.01); H10P 70/20 (2026.01); C07C 251/44 (2013.01); C11D 3/43 (2013.01); C11D 7/32 (2013.01);
Abstract
The substrate treating liquid according to the present invention can be used for removing a liquid on a substrate such as a semiconductor substrate having a pattern-formed surface, and is characterized by including cyclohexanone oxime as a sublimable substance, and at least one solvent selected from the group consisting of alcohols, ketones, ethers, cycloalkanes and water.