The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 16, 2026

Filed:

Jun. 05, 2020
Applicant:

Vuereal Inc., Waterloo, CA;

Inventors:

Gholamreza Chaji, Waterloo, CA;

Lauren Lesergent, Kitchener, CA;

Ehsanollah Fathi, Waterloo, CA;

Aaron Daniel Trent Wiersma, Kitchener, CA;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10H 20/01 (2025.01); H10H 20/815 (2025.01); H10H 29/14 (2025.01);
U.S. Cl.
CPC ...
H10H 20/01 (2025.01); H10H 20/815 (2025.01); H10H 29/142 (2025.01);
Abstract

Devices and methods for patterning the vertical solid state devices are provided. In some examples, a method of fabricating micro devices comprising forming device layers on a substrate, forming a first masking layer on a top layer of the device layers, forming a second masking layer on the first masking layer; and etching the device layers using the first and second masking layers to pattern the device layers.


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