The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2026
Filed:
Jul. 21, 2023
California Institute of Technology, Pasadena, CA (US);
Michael E. Hoenk, Valencia, CA (US);
April D. Jewell, Los Angeles, CA (US);
Todd J. Jones, Altadena, CA (US);
Shouleh Nikzad, Valencia, CA (US);
California Institute of Technology, Pasadena, CA (US);
Abstract
Disclosed herein is a method of coating a detector. The method includes: providing the detector including a detector surface; performing a planarization process to the detector surface; performing a piranha clean process to the planarized surface; performing a slight etch to the piranha cleaned surface; performing an ammonium fluoride etching step to the slight etched surface to create a decontaminated surface. The decontaminated surface is an atomically flat silicon surface with surface and subsurface damage and contamination significantly reduced. A multilayer 2D-doped layer may be epitaxially grown on the decontaminated surface. The detector may provide high quantum efficiency with uniform and stable performance from room temperature to cryogenic temperatures.