Silicon carbide metal oxide semiconductor field effect transistor device

Abstract

A silicon carbide metal oxide semiconductor field effect transistor device includes a substrate, an epitaxial layer, and a plurality of cell units each of which includes a first cell and a second cell that are disposed in the epitaxy layer and connected to each other in the epitaxy layer. The first cell includes a first Schottky region, a first junction field effect region, a first well region, a first well contact structure, a first source region, a first Schottky metal, a first ohmic contact metal, and a first gate structure. The second cell includes a second Schottky region, a second junction field effect region, a second well region, a second well contact structure, a second source region, a second Schottky metal, a second ohmic contact metal, and a second gate structure. In the epitaxial layer, the first junction field effect region is connected to the second Schottky region.