The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2026
Filed:
May. 01, 2023
Coherent Lasersystems Gmbh & Co. KG, Göttingen, DE;
Igor Bragin, Göttingen, DE;
Jozsef Bekesi, Göttingen, DE;
Coherent LaserSystems GmbH & Co. KG, Göttingen, DE;
Abstract
An excimer laser includes a chamber for containing a gas mixture between a rear end and a front end of a linear laser resonator, a convex end-mirror defining the rear end, and a plurality of output-coupling mirrors collectively defining the front end. The output-coupling mirrors are distributed along an optical axis of the resonator and have respective normal vectors pointing toward the rear end. The normal vectors include four mutually non-parallel normal vectors, wherein no three of the four mutually non-parallel normal vectors are coplanar. These different orientations of the output-coupling mirrors cooperate with the convex end-mirror to blur fine structure in the output beam of the resonator.