The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2026
Filed:
Aug. 23, 2022
Applicant:
Nikon Corporation, Tokyo, JP;
Inventors:
Daniel Gene Smith, Tucson, AZ (US);
Brian Lee Stamper, Tucson, AZ (US);
Assignee:
NIKON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 27/48 (2006.01); G02B 27/09 (2006.01); G02B 27/14 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G02B 27/0961 (2013.01); G02B 27/0905 (2013.01); G02B 27/0944 (2013.01); G02B 27/145 (2013.01); G02B 27/48 (2013.01); G03F 7/70583 (2013.01);
Abstract
An optical system includes a first optical system, a second optical system, and a third optical system. The first optical system divides an input beam into a first light and a second light. The second optical system includes a concave reflective surface which reflects the first light. The third optical system directs at least one of the first light reflected from the second optical system and the second light from the first optical system to an output optical path of the third optical system.