The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2026
Filed:
Feb. 22, 2022
Applicant:
Micro-epsilon-messtechnik Gmbh & Co. K.g., Ortenburg, DE;
Inventors:
Harald Haas, Ruhstorf a.d. Rott, DE;
Reinhold Hoenicka, Bad Griesbach, DE;
Tobias Schopf, Haarbach, DE;
Guenter Schallmoser, Ruhstorf, DE;
Assignee:
MICRO-EPSILON-MESSTECHNIK Gmbh & Co. K.G., Ortenburg, DE;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G01B 7/00 (2006.01); G02B 7/18 (2021.01);
U.S. Cl.
CPC ...
G02B 26/0816 (2013.01); G01B 7/003 (2013.01); G02B 7/181 (2013.01);
Abstract
An actuator-sensor system for controlled diverting or deflecting of electromagnetic radiation in at least one axis (), with an actuator () for mechanically moving a deflecting element () and with a measuring element () for sensing the position of the deflecting element (), where the measuring element () includes a flat substrate () having at least one sensor element (). Furthermore, the present disclosure relates to a fast steering mirror (FSM).