The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2026
Filed:
Dec. 08, 2023
Lawrence Semiconductor Research Laboratory, Inc., Tempe, AZ (US);
Bishnu Prasanna Gogoi, Scottsdale, AZ (US);
Chantal Arena, Mesa, AZ (US);
Lawrence Semiconductor Research Laboratory, Inc., Tempe, AZ (US);
Abstract
A semiconductor device is disclosed having one or more stops that is configured to limit movement of a moving mass. The one or more stops are formed in or on the semiconductor substrate. The one or more stops are attached to the moving mass. An intermediate layer is formed overlying the semiconductor substrate. A device layer is formed overlying the intermediate layer. The device layer, the intermediate layer, and the semiconductor substrate are single crystal. The moving mass is formed in the device layer with the one or more stops. The one or more stops comprises the material of the device layer. The moving mass couples to at least one anchor. Portions of the intermediate layer are removed to free the moving mass in relation to the semiconductor substrate.