Control device for substrate transfer robot and control method for joint motor

Abstract

A control device controls a substrate transfer robot including a hand, a joint, and a joint motor. The control device modifies a target position of the hand when it places substrate at transfer destination, based on positional misalignment information indicating misalignment of substrate. To change a position at which the hand places the substrate to target position after modification, the control device performs first velocity control and second velocity control. In first velocity control, velocity of hand that is approaching target position before modification with the velocity decreasing is made constant by correcting. In second velocity control, velocity of hand decreases by slope equal to the slope of velocity of the hand immediately before first velocity control and hand is stopped at target position after modification. Time during which the first velocity control is performed increases as a magnitude of change in the target position due to the modification increases.