The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2026
Filed:
Dec. 16, 2022
Applicant:
Intec Corporation Co., Ltd., Gyeonggi-do, KR;
Inventors:
Assignees:
INTEC CORPORATION CO., LTD., Gyeonggi-do, KR;
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 41/06 (2012.01); B24B 7/04 (2006.01); B24B 37/24 (2012.01);
U.S. Cl.
CPC ...
B24B 41/06 (2013.01); B24B 7/04 (2013.01); B24B 37/24 (2013.01);
Abstract
A polishing device for delayering includes: a stage which is installed to move along the X-axis and the Y-axis, and is rotatable about its own axis; a holder installed above the stage and supporting an object mounted on the upper surface thereof; and a grinder unit installed to be movable above the holder and having a polishing pad on one surface thereof corresponding to the object. The holder includes a rotating plate, a fixing unit installed on one side of an inner wall of the rotating plate, and horizontal correction rings that protrudes upward from an upper surface of the rotating plate.