The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2026
Filed:
Jan. 28, 2022
Sumco Corporation, Tokyo, JP;
Yuji Miyazaki, Tokyo, JP;
SUMCO CORPORATION, Tokyo, JP;
Abstract
A processing condition setting apparatus includes a controller that selects a parameter set to be applied to the wafer processing apparatus from a plurality of parameter sets. The controller estimates, for each of the parameter sets, the post-processing characteristics of the wafer to be processed, based on the pre-processing characteristics of the wafer to be processed and the processing data, assuming that the wafer to be processed has been processed by applying each of the parameter sets. The controller calculates two or more indicators for each of the post-processing characteristics and obtains constraints on the indicators. The controller selects a parameter set, which is to be applied to the wafer processing apparatus when processing the wafer to be processed, from among the conformed parameter sets in which the indicators satisfy the constraints.