The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2026
Filed:
Nov. 08, 2023
Applicant:
Semes Co., Ltd., Cheonan-si, KR;
Inventor:
Seongsoo Lee, Suwon-si, KR;
Assignee:
Semes Co., Ltd., Chungcheongnam-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10P 72/00 (2026.01); B08B 3/08 (2006.01); B08B 3/12 (2006.01); B08B 13/00 (2006.01);
U.S. Cl.
CPC ...
B08B 3/12 (2013.01); B08B 3/08 (2013.01); B08B 13/00 (2013.01);
Abstract
Provided is an apparatus for cleaning a part of a substrate processing apparatus, the apparatus including a chemical solution storage tank for storing a chemical solution, a filter configured to filter the chemical solution supplied from the chemical solution storage tank, a heater configured to heat the filtered chemical solution, and a vibrator arranged adjacent to the filter and configured to provide vibration to the filter.
Quick Actions:
Lee, Seongsoo. (2026). Part cleaning apparatus and part cleaning method (U.S. Patent No. 12654208). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12654208
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile