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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12652998 B1

PDFFull Text
Date of Patent:
Jun. 09, 2026

Filed:

Oct. 02, 2024

Apparatus for processing substrate

Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Yeontae Kim, Suwon-si, KR;

Yihwan Kim, Suwon-si, KR;

Woohyung Kim, Suwon-si, KR;

Sunwoo Bang, Suwon-si, KR;

Kwanghyun Yang, Suwon-si, KR;

Assignee:

SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;

Attorney:

Sughrue Mion, PLLC

Primary Examiner:

Tung X Le

Int. Cl.
CPC ...
H01J 37/32 (2006.01); H10P 72/76 (2026.01); H10P 72/00 (2026.01);
U.S. Cl.
CPC ...
H10P 72/7612 (2026.01); H01J 37/3244 (2013.01); H01J 37/32724 (2013.01); H01J 2237/3321 (2013.01); H01J 2237/3341 (2013.01); H10P 72/0432 (2026.01);
Abstract

An apparatus for processing a substrate is provided and includes: a chamber including an internal space; a shower head in the internal space of the chamber; a heater below the shower head; lift pins configured to lift the substrate, relative to the heater, while the substrate is on the heater; a rotation shaft connected to the heater; a rotation driving actuator connected to the rotation shaft and configured to rotate the heater by rotating the rotation shaft; a first lifting driving actuator configured to lift the heater; a lifting member configured to lift the lift pins; and a second lifting driving actuator connected to the lifting member and configured to lift the lift pins, relative to the heater, by lifting the lifting member.

Find Patent Forward Citations

Kim, Yeontae. (2026). Apparatus for processing substrate (U.S. Patent No. 12652998). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12652998

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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