The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2026
Filed:
Jul. 25, 2023
Murata Manufacturing Co., Ltd., Nagaokakyo, JP;
Kazunori Inoue, Nagaokakyo, JP;
Yuta Ishii, Nagaokakyo, JP;
Munehisa Watanabe, Nagaokakyo, JP;
Ventsislav Yantchev, Sofia, BG;
Patrick Turner, Portola Valley, CA (US);
Bryant Garcia, Mississauga, CA;
MURATA MANUFACTURING CO., LTD., Nagaokakyo, JP;
Abstract
An acoustic wave device is provided that includes a support substrate, a piezoelectric layer on the support substrate, a first electrode and a second electrode on the piezoelectric layer in a lamination direction of the support substrate and the piezoelectric layer, the first and the second electrodes are opposed in a first direction that intersects with the lamination direction; and a space that defines either a cavity in a portion of the support substrate or an air gap between the support substrate and the piezoelectric layer. A portion of each of the first and the second electrodes overlaps the space in a plan view in the lamination direction. A first roughness of a major surface of the support substrate, opposite from the piezoelectric layer, is greater than a second roughness of a major surface of the piezoelectric layer on which the first and second electrodes are located.