The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2026

Filed:

Jun. 28, 2022
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Philip Allan Kraus, San Jose, CA (US);

Thai Cheng Chua, Cupertino, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 16/455 (2006.01); C23C 16/511 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32192 (2013.01); C23C 16/45544 (2013.01); C23C 16/511 (2013.01); H01J 37/32201 (2013.01); H01J 37/32211 (2013.01); H01J 37/32247 (2013.01); H01J 37/32311 (2013.01); H01J 37/3244 (2013.01); H01J 2237/334 (2013.01);
Abstract

Embodiments include a modular microwave source. In an embodiment, the modular microwave source comprises a voltage control circuit, a voltage controlled oscillator, where an output voltage from the voltage control circuit drives oscillation in the voltage controlled oscillator. The modular microwave source may also include a solid state microwave amplification module coupled to the voltage controlled oscillator. In an embodiment, the solid state microwave amplification module amplifies an output from the voltage controlled oscillator. The modular microwave source may also include an applicator coupled to the solid state microwave amplification module, where the applicator is a dielectric resonator.


Find Patent Forward Citations

Kraus, Philip. (2026). Modular microwave plasma source (U.S. Patent No. 12651727). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12651727

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…