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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12650647 B1

PDFFull Text
Date of Patent:
Jun. 09, 2026

Filed:

Jul. 09, 2020

Liquid chemical and method for producing liquid chemical

Applicant:

Fujifilm Corporation, Tokyo, JP;

Inventor:

Tetsuya Kamimura, Shizuoka, JP;

Assignee:

FUJIFILM Corporation, Tokyo, JP;

Attorney:

Sughrue Mion, PLLC

Primary Examiner:

Jonathan Johnson

Assistant Examiner:

Jayson D Cosgrove

Int. Cl.
CPC ...
G03F 7/32 (2006.01); B01D 39/16 (2006.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01); G03F 7/00 (2006.01); G03F 7/004 (2006.01); H10P 14/60 (2026.01);
U.S. Cl.
CPC ...
G03F 7/32 (2013.01); B01D 39/1692 (2013.01); G03F 7/0048 (2013.01); G03F 7/70025 (2013.01); H10P 14/6509 (2026.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01);
Abstract

An object of the present invention is to provide a liquid chemical exhibiting excellent defect inhibitive performance even in a case of being applied to a resist process by EUV exposure. Another object thereof is to provide a method for producing a liquid chemical. The liquid chemical of the present invention includes an organic solvent, and metal-containing particles containing a metal atom, in which the number of metal nanoparticles contained in the metal-containing particles and having a particle size of 0.5 to 17 nm is 1.0×10to 1.0×10particles/cm, based on the number of the particles per unit volume of the liquid chemical.

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Kamimura, Tetsuya. (2026). Liquid chemical and method for producing liquid chemical (U.S. Patent No. 12650647). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12650647

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