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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12650379 B1

PDFFull Text
Date of Patent:
Jun. 09, 2026

Filed:

Oct. 18, 2022

Tunable shrinkage and trim process for fabricating gratings

Applicant:

Meta Platforms Technologies, Llc, Menlo Park, CA (US);

Inventors:

Austin Lane, Snohomish, WA (US);

Ankit Vora, Bothell, WA (US);

Richard Farrell, Seattle, WA (US);

Keren Zhang, Woodinville, WA (US);

Assignee:

Meta Platforms Technologies, LLC, Menlo Park, CA (US);

Attorney:

Greenberg Traurig, LLP

Primary Examiner:

Daborah Chacko-Davis

Int. Cl.
CPC ...
G03F 7/00 (2006.01); G01N 21/47 (2006.01); G01N 21/956 (2006.01); G03F 7/20 (2006.01); G03F 7/40 (2006.01);
U.S. Cl.
CPC ...
G01N 21/4788 (2013.01); G01N 21/956 (2013.01); G03F 7/0005 (2013.01); G03F 7/0035 (2013.01); G03F 7/2022 (2013.01); G03F 7/40 (2013.01); G03F 7/70625 (2013.01); G01N 2021/95676 (2013.01);
Abstract

A method is provided. The method includes forming a shrink material layer over a substrate including a photoresist pattern. The method also includes exposing the substrate with the shrink material layer to an activating radiation via a grey-tone mask that provides a predetermined light transmittance profile for the activating radiation. The method also includes removing at least a portion of the shrink material layer.

Find Patent Forward Citations

Lane, Austin. (2026). Tunable shrinkage and trim process for fabricating gratings (U.S. Patent No. 12650379). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12650379

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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