The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2026
Filed:
Feb. 21, 2023
Elspes Inc., Daejeon, KR;
Ji Hwan An, Seoul, KR;
Sa Rah Eun Kyung Kim, Seoul, KR;
Do Hyun Go, Seogwipo-si, KR;
Jeong Woo Shin, Seoul, KR;
ELSPES INC., Daejeon, KR;
Abstract
A silicon capacitor may include a silicon substrate having a three-dimensional pattern, and a dielectric thin film disposed over the silicon substrate and having a structure with a crystal gradient form. A manufacturing method of a dielectric thin film capacitor may include etching a silicon substrate to form a three-dimensional pattern, depositing an amorphous thin film on the etched silicon substrate at a temperature below 300° C., and embedding crystalline grains in the deposited amorphous thin film by performing plasma treatment. A manufacturing method of a dielectric thin film capacitor may include etching a silicon substrate to form a three-dimensional pattern, depositing an amorphous thin film on the etched silicon substrate at a temperature below 300° C., and depositing a crystalline layer on the deposited amorphous thin film by performing plasma treatment.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile