The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2026
Filed:
Nov. 03, 2023
Semes Co., Ltd., Cheonan-si, KR;
Myung A Jeon, Jeollanam-do, KR;
Young Seop Choi, Chungcheongnam-do, KR;
Bok Kyu Lee, Chungcheongnam-do, KR;
Joo Sung Lee, Chungcheongnam-do, KR;
Je Myung Cha, Busan, KR;
Abstract
A substrate processing apparatus comprises a substrate support unit configured to support and rotate a substrate; and a spray unit including a nozzle structure and configured to discharge a substrate processing liquid onto the substrate using the nozzle structure. The nozzle structure comprises a first inlet pipe configured to provide a first chemical liquid; a second inlet pipe configured to provide a second chemical liquid; a reaction space module configured to mix the first chemical liquid and the second chemical liquid; and a discharge pipe configured to discharge a mixture solution of the first chemical liquid and the second chemical liquid into the substrate processing liquid. The first chemical liquid includes ozone gas, and the second chemical liquid includes an OH component.