The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2026
Filed:
Jan. 30, 2024
Seiko Epson Corporation, Tokyo, JP;
Akira Sano, Matsumoto, JP;
SEIKO EPSON CORPORATION, Tokyo, JP;
Abstract
A tunable interference filter includes: a first substrate provided with a first reflection film; and a second substrate provided with a second reflection film facing the first reflection film with a gap between the first reflection film and the second reflection film. The first substrate includes a movable portion that is a portion where the first reflection film is provided, a diaphragm portion surrounding the movable portion, and a base portion supporting the movable portion via the diaphragm portion to allow displacement of the movable portion in a thickness direction, the diaphragm portion is a portion in which a thickness at the first substrate is thinner than a thickness of the base portion due to a groove opened in a surface of the first substrate, and a width of a bottom portion of the groove is larger than a width of an opening of the groove.