The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2026
Filed:
Oct. 17, 2022
Applicant:
Newport Fab, Llc, Newport Beach, CA (US);
Inventors:
Zhirong Tang, Lake Oswego, OR (US);
Oleg Martynov, Lebanon, NH (US);
Edward Preisler, San Clemente, CA (US);
Assignee:
Newport Fab, LLC, Newport Beach, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/01 (2006.01); H05B 3/14 (2006.01);
U.S. Cl.
CPC ...
G02F 1/0147 (2013.01); H05B 3/143 (2013.01);
Abstract
A semiconductor structure has a substrate and a thermally-tunable photonics device in or over the substrate. A tantalum nitride (TaN) resistive heater is over the substrate and proximate to the thermally-tunable photonics device. The TaN resistive heater is configured to tune the thermally-tunable photonics device.