The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2026
Filed:
Jul. 14, 2021
Hitachi High-tech Corporation, Tokyo, JP;
Naoto Takano, Tokyo, JP;
Hyakka Nakada, Tokyo, JP;
Takeshi Ohmori, Tokyo, JP;
Yutaka Okuyama, Tokyo, JP;
Hitachi High-Tech Corporation, Tokyo, JP;
Abstract
High-accuracy fitting for complex shapes that can occur in semiconductor processing is performed. A shape model is a curved line that is drawn with one stroke from its start point to its end point along a periphery of a figure that is a combination of one or more ellipses and one or more line segments in an xy-plane defined by an x axis and a y axis which are perpendicular to each other, and constraint conditions of a shape model are derived on the basis of a processing dimension function that represents processing dimensions specified on the basis of singular points in the shape model and that has shape model parameters as its variables, and definition ranges of the processing dimensions.